Iterative control of dynamics-coupling-caused errors in piezoscanners during high-speed AFM operation

Szuchi Tien, Qingze Zou, Santosh Devasia. Iterative control of dynamics-coupling-caused errors in piezoscanners during high-speed AFM operation. IEEE Trans. Contr. Sys. Techn., 13(6):921-931, 2005. [doi]

@article{TienZD05,
  title = {Iterative control of dynamics-coupling-caused errors in piezoscanners during high-speed AFM operation},
  author = {Szuchi Tien and Qingze Zou and Santosh Devasia},
  year = {2005},
  doi = {10.1109/TCST.2005.854334},
  url = {http://dx.doi.org/10.1109/TCST.2005.854334},
  researchr = {https://researchr.org/publication/TienZD05},
  cites = {0},
  citedby = {0},
  journal = {IEEE Trans. Contr. Sys. Techn.},
  volume = {13},
  number = {6},
  pages = {921-931},
}