Low temperature deposition of SiNx thin films by the LPCVD method - researchr publication authors

researchr

You are not signed in
Sign in
Sign up

Zdenko Tijanic, Davor Ristic, Mile Ivanda, Ivancica Bogdanovic-Rakovic, Marijan Marcius, Mira Ristic, Ozren Gamulin, Svetozar Music, Kresimir Furic, Alessandro Chiasera, Maurizio Ferrari, Giancarlo Cesare Righini. Low temperature deposition of SiNx thin films by the LPCVD method. In MIPRO, 2011 Proceedings of the 34th International Convention, Opatija, Croatia, 23-27 May, 2011. pages 23-24, IEEE, 2011. [doi]

This author has not been identified. Look up 'Zdenko Tijanic' in GoogleThis author has not been identified. Look up 'Davor Ristic' in GoogleThis author has not been identified. Look up 'Mile Ivanda' in GoogleThis author has not been identified. Look up 'Ivancica Bogdanovic-Rakovic' in GoogleThis author has not been identified. Look up 'Marijan Marcius' in GoogleThis author has not been identified. Look up 'Mira Ristic' in GoogleThis author has not been identified. Look up 'Ozren Gamulin' in GoogleThis author has not been identified. Look up 'Svetozar Music' in GoogleThis author has not been identified. Look up 'Kresimir Furic' in GoogleThis author has not been identified. Look up 'Alessandro Chiasera' in GoogleThis author has not been identified. Look up 'Maurizio Ferrari' in GoogleThis author has not been identified. Look up 'Giancarlo Cesare Righini' in Google

runs on WebDSL