Zdenko Tijanic, Davor Ristic, Mile Ivanda, Ivancica Bogdanovic-Rakovic, Marijan Marcius, Mira Ristic, Ozren Gamulin, Svetozar Music, Kresimir Furic, Alessandro Chiasera, Maurizio Ferrari, Giancarlo Cesare Righini. Low temperature deposition of SiNx thin films by the LPCVD method. In MIPRO, 2011 Proceedings of the 34th International Convention, Opatija, Croatia, 23-27 May, 2011. pages 23-24, IEEE, 2011. [doi]
Abstract is missing.