Process Variability in Top-Down Fabrication of Silicon Nanowire-Based Biosensor Arrays

Marcel Tintelott, Vivek Pachauri, Sven Ingebrandt, Xuan-Thang Vu. Process Variability in Top-Down Fabrication of Silicon Nanowire-Based Biosensor Arrays. Sensors, 21(15):5153, 2021. [doi]

Abstract

Abstract is missing.