Enabling Fabrication of PZT Based PiezoMEMS Devices

Sudhanshu Tiwari, Randhir Kumar, Ajay Dangi, Rudra Pratap. Enabling Fabrication of PZT Based PiezoMEMS Devices. In 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018. pages 1-4, IEEE, 2018. [doi]

Abstract

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