Nguyen Van Toan, Tomohiro Kubota, Halubai Seknar, Seiji Samukawa, Takahito Ono. Fabrication and evaluation of silicon micromechanical resonator using neutral beam etching technology. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 1-5, IEEE, 2014. [doi]
Abstract is missing.