Lithography hotspot detection by two-stage cascade classifier using histogram of oriented light propagation - researchr publication authors

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Yoichi Tomioka, Tetsuaki Matsunawa, Chikaaki Kodama, Shigeki Nojima. Lithography hotspot detection by two-stage cascade classifier using histogram of oriented light propagation. In 22nd Asia and South Pacific Design Automation Conference, ASP-DAC 2017, Chiba, Japan, January 16-19, 2017. pages 81-86, IEEE, 2017. [doi]

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