Lithography hotspot detection by two-stage cascade classifier using histogram of oriented light propagation

Yoichi Tomioka, Tetsuaki Matsunawa, Chikaaki Kodama, Shigeki Nojima. Lithography hotspot detection by two-stage cascade classifier using histogram of oriented light propagation. In 22nd Asia and South Pacific Design Automation Conference, ASP-DAC 2017, Chiba, Japan, January 16-19, 2017. pages 81-86, IEEE, 2017. [doi]

@inproceedings{TomiokaMKN17,
  title = {Lithography hotspot detection by two-stage cascade classifier using histogram of oriented light propagation},
  author = {Yoichi Tomioka and Tetsuaki Matsunawa and Chikaaki Kodama and Shigeki Nojima},
  year = {2017},
  doi = {10.1109/ASPDAC.2017.7858300},
  url = {http://dx.doi.org/10.1109/ASPDAC.2017.7858300},
  researchr = {https://researchr.org/publication/TomiokaMKN17},
  cites = {0},
  citedby = {0},
  pages = {81-86},
  booktitle = {22nd Asia and South Pacific Design Automation Conference, ASP-DAC 2017, Chiba, Japan, January 16-19, 2017},
  publisher = {IEEE},
  isbn = {978-1-5090-1558-0},
}