Free Standing Stress Amplification Structure for Ultrasensitive 3C-SiC/Si Pressure Sensor

Braiden Tong, Hong-Quan Nguyen, Tuan Hung Nguyen, Tuan-Khoa Nguyen, Viet Thanh Nguyen, Toan Dinh, Trung Hieu Vu, Van Thanh Dau, Dzung Viet Dao. Free Standing Stress Amplification Structure for Ultrasensitive 3C-SiC/Si Pressure Sensor. In 2022 IEEE Sensors, Dallas, TX, USA, October 30 - Nov. 2, 2022. pages 1-4, IEEE, 2022. [doi]

@inproceedings{TongNNNNDVDD22,
  title = {Free Standing Stress Amplification Structure for Ultrasensitive 3C-SiC/Si Pressure Sensor},
  author = {Braiden Tong and Hong-Quan Nguyen and Tuan Hung Nguyen and Tuan-Khoa Nguyen and Viet Thanh Nguyen and Toan Dinh and Trung Hieu Vu and Van Thanh Dau and Dzung Viet Dao},
  year = {2022},
  doi = {10.1109/SENSORS52175.2022.9967353},
  url = {https://doi.org/10.1109/SENSORS52175.2022.9967353},
  researchr = {https://researchr.org/publication/TongNNNNDVDD22},
  cites = {0},
  citedby = {0},
  pages = {1-4},
  booktitle = {2022 IEEE Sensors, Dallas, TX, USA, October 30 - Nov. 2, 2022},
  publisher = {IEEE},
  isbn = {978-1-6654-8464-0},
}