Braiden Tong, Hong-Quan Nguyen, Tuan Hung Nguyen, Tuan-Khoa Nguyen, Viet Thanh Nguyen, Toan Dinh, Trung Hieu Vu, Van Thanh Dau, Dzung Viet Dao. Free Standing Stress Amplification Structure for Ultrasensitive 3C-SiC/Si Pressure Sensor. In 2022 IEEE Sensors, Dallas, TX, USA, October 30 - Nov. 2, 2022. pages 1-4, IEEE, 2022. [doi]
Abstract is missing.