3-2-1 contact: an experimental approach to the analysisof contacts in 45 nm and below

Rasit Onur Topaloglu. 3-2-1 contact: an experimental approach to the analysisof contacts in 45 nm and below. In Sherief Reda, Janet Meiling Wang, editors, International Workshop on System Level Interconnect Prediction Workshop, SLIP 2010, Anaheim, CA, USA, June 13, 2010. pages 59-66, ACM, 2010. [doi]

Abstract

Abstract is missing.