Design Optimization for the Measurement Accuracy Improvement of a Large Range Nanopositioning Stage

Marta Torralba, José Antonio Yagüe-Fabra, José Antonio Albajez, Juan José Aguilar. Design Optimization for the Measurement Accuracy Improvement of a Large Range Nanopositioning Stage. Sensors, 16(1):84, 2016. [doi]

Abstract

Abstract is missing.