Hiroshi Toshiyoshi, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu. A mixed-design technique for integrated MEMS using a circuit simulator with HDL. In Proceedings of the 20th International Conference Mixed Design of Integrated Circuits and Systems - MIXDES 2013, Gdynia, Poland, June 20-22, 2013. pages 17-22, IEEE, 2013. [doi]
Abstract is missing.