Behavior analysis of a 3-axis detection push-pull piezoresistive MEMS accelerometer

Fares Tounsi, E. Ayechi, Brahim Mezghani, Mohamed Masmoudi, M. Kandpal, V. Ramgopal Rao. Behavior analysis of a 3-axis detection push-pull piezoresistive MEMS accelerometer. In 12th IEEE International Multi-Conference on Systems, Signals & Devices, SSD 2015, Mahdia, Tunisia, March 16-19, 2015. pages 1-6, IEEE, 2015. [doi]

Abstract

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