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Modeling of a planar motion stage for precision positioning

Kai Treichel, Remon Al Azrak, Johann Reger, Kai Wulff. Modeling of a planar motion stage for precision positioning. In 18th International Conference on Methods & Models in Automation & Robotics, MMAR 2013, Miedzyzdroje, Poland, August 26-29, 2013. pages 51-56, IEEE, 2013. [doi]

Authors

Kai Treichel

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Remon Al Azrak

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Johann Reger

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Kai Wulff

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