Piezoelectric MEMS Vibration Sensor Module for Machining Quality Prediction

Shyam Trivedi, Ranjith Hosur Ganesh, Tung Shen, Po-Wen Huang, Sheng-Shian Li. Piezoelectric MEMS Vibration Sensor Module for Machining Quality Prediction. In 2020 IEEE Sensors, Rotterdam, The Netherlands, October 25-28, 2020. pages 1-4, IEEE, 2020. [doi]

Abstract

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