Design Procedure and Fabrication of Reproducible Silicon Vernier Devices for High-Performance Refractive Index Sensing

Benedetto Troia, Ali Z. Khokhar, Milos Nedeljkovic, Scott A. Reynolds, Youfang Hu, Goran Z. Mashanovich, Vittorio M. N. Passaro. Design Procedure and Fabrication of Reproducible Silicon Vernier Devices for High-Performance Refractive Index Sensing. Sensors, 15(6):13548-13567, 2015. [doi]

Abstract

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