Tsung-Heng Tsai, Song-You Hong. A CMOS-MEMS Pressure Sensor with Integrated Front-End for Chemical Vapor Deposition Systems. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]
@inproceedings{TsaiH23-2,
title = {A CMOS-MEMS Pressure Sensor with Integrated Front-End for Chemical Vapor Deposition Systems},
author = {Tsung-Heng Tsai and Song-You Hong},
year = {2023},
doi = {10.1109/SENSORS56945.2023.10325313},
url = {https://doi.org/10.1109/SENSORS56945.2023.10325313},
researchr = {https://researchr.org/publication/TsaiH23-2},
cites = {0},
citedby = {0},
pages = {1-4},
booktitle = {2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023},
publisher = {IEEE},
isbn = {979-8-3503-0387-2},
}