A CMOS-MEMS Pressure Sensor with Integrated Front-End for Chemical Vapor Deposition Systems

Tsung-Heng Tsai, Song-You Hong. A CMOS-MEMS Pressure Sensor with Integrated Front-End for Chemical Vapor Deposition Systems. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]

Abstract

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