Ya-Chih Tsai, Jihong Pang, Fuh-Der Chou. Modeling and Scheduling for the Clean Operation of Semiconductor Manufacturing. In Kangshun Li, Wei Li 0078, Hui Wang 0033, Yong Liu 0012, editors, Artificial Intelligence Algorithms and Applications - 11th International Symposium, ISICA 2019, Guangzhou, China, November 16-17, 2019, Revised Selected Papers. Volume 1205 of Communications in Computer and Information Science, pages 488-496, Springer, 2019. [doi]
Abstract is missing.