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A CMOS Micromachined Capacitive Tactile Sensor With Integrated Readout Circuits and Compensation of Process Variations

Tsung-Heng Tsai, Hao-Cheng Tsai, Tien-Keng Wu. A CMOS Micromachined Capacitive Tactile Sensor With Integrated Readout Circuits and Compensation of Process Variations. IEEE Trans. Biomed. Circuits and Systems, 8(5):608-616, 2014. [doi]

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