Polymer material grating used on contactless sub-wavelength MEMS physical sensors

Kuo-Chun Tseng, Te-Hsun Lin, Norbert Modsching, Weileun Fang, Chien-Chung Fu. Polymer material grating used on contactless sub-wavelength MEMS physical sensors. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 592-595, IEEE, 2014. [doi]

Abstract

Abstract is missing.