Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process

Jian-Zhi Tseng, Chyan-Chyi Wu, Ching-Liang Dai. Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process. Sensors, 14(4):6722-6733, 2014. [doi]

Abstract

Abstract is missing.