Effects of Source and Drain Impurity Profile on Breakdown Voltage of High-Performance Si TFTs

Shinzo Tsuboi, Genshiro Kawachi, Masahiro Mitani, Takashi Okada. Effects of Source and Drain Impurity Profile on Breakdown Voltage of High-Performance Si TFTs. Inf. Media Technol., 3(1):1-6, 2008. [doi]

@article{TsuboiKMO08,
  title = {Effects of Source and Drain Impurity Profile on Breakdown Voltage of High-Performance Si TFTs},
  author = {Shinzo Tsuboi and Genshiro Kawachi and Masahiro Mitani and Takashi Okada},
  year = {2008},
  doi = {10.11185/imt.3.1},
  url = {https://doi.org/10.11185/imt.3.1},
  researchr = {https://researchr.org/publication/TsuboiKMO08},
  cites = {0},
  citedby = {0},
  journal = {Inf. Media Technol.},
  volume = {3},
  number = {1},
  pages = {1-6},
}