Development of Test Structure for Variability Evaluation using Charge-Based Capacitance Measurement

Katsuhiro Tsuji, Kazuo Terada, Ryota Kikuchi. Development of Test Structure for Variability Evaluation using Charge-Based Capacitance Measurement. IEICE Transactions, 97-C(11):1117-1123, 2014. [doi]

Abstract

Abstract is missing.