Selective patterning of indium tin oxide films using 1064 nm laser for micro parts processing

Kun-Tse Tu, Chen-Kuei Chung. Selective patterning of indium tin oxide films using 1064 nm laser for micro parts processing. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 382-385, IEEE, 2014. [doi]

Abstract

Abstract is missing.