Study on thermoelastic dissipation in bulk mode resonators with etch holes

Cheng Tu, Joshua E.-Y. Lee. Study on thermoelastic dissipation in bulk mode resonators with etch holes. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 478-482, IEEE, 2012. [doi]

Abstract

Abstract is missing.