Cheng Tu, Joshua E.-Y. Lee, Astrid Frank, Christoph Schaffel, Uwe Stehr, Matthias Hein 0002. Probing anchor losses in AlN-on-Si contour mode MEMS resonators through laser Doppler vibrometry. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]
Abstract is missing.