Thermal stress probing the channel-length modulation effect of nano n-type FinFETs

Fu-Yuan Tuan, Chii-Wen Chen, Mu-Chun Wang, Wen-Shiang Liao, Shea-Jue Wang, Shou-Kong Fan, Wen-How Lan. Thermal stress probing the channel-length modulation effect of nano n-type FinFETs. Microelectronics Reliability, 83:260-270, 2018. [doi]

Abstract

Abstract is missing.