Neural network based control strategies for improving plasma characteristics in reactive ion etching

N. Tudoroiu, Rajnikant V. Patel, Khashayar Khorasani. Neural network based control strategies for improving plasma characteristics in reactive ion etching. Neurocomputing, 69(7-9):786-802, 2006. [doi]

Authors

N. Tudoroiu

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Rajnikant V. Patel

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Khashayar Khorasani

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