Neural network based control strategies for improving plasma characteristics in reactive ion etching

N. Tudoroiu, Rajnikant V. Patel, Khashayar Khorasani. Neural network based control strategies for improving plasma characteristics in reactive ion etching. Neurocomputing, 69(7-9):786-802, 2006. [doi]

References

No references recorded for this publication.

Cited by

No citations of this publication recorded.