Tushar Udeshi. Accurate and robust geometric modeling for simulation of IC and MEMS fabrication processes. In Leif Kobbelt, Vadim Shapiro, editors, Proceedings of the Ninth ACM Symposium on Solid and Physical Modeling 2005, Cambridge, Massachusetts, USA, June 13-15, 2005. pages 257-266, ACM, 2005. [doi]
Abstract is missing.