Satoshi Ueno, Toshiki Naganawa, Yasuo Kokubun. High UV Sensitivity of SiON Film and Its Application to Center Wavelength Trimming of Microring Resonator Filter. IEICE Transactions, 88-C(5):998-1004, 2005. [doi]
@article{UenoNK05, title = {High UV Sensitivity of SiON Film and Its Application to Center Wavelength Trimming of Microring Resonator Filter}, author = {Satoshi Ueno and Toshiki Naganawa and Yasuo Kokubun}, year = {2005}, doi = {10.1093/ietele/e88-c.5.998}, url = {http://dx.doi.org/10.1093/ietele/e88-c.5.998}, researchr = {https://researchr.org/publication/UenoNK05}, cites = {0}, citedby = {0}, journal = {IEICE Transactions}, volume = {88-C}, number = {5}, pages = {998-1004}, }