High UV Sensitivity of SiON Film and Its Application to Center Wavelength Trimming of Microring Resonator Filter

Satoshi Ueno, Toshiki Naganawa, Yasuo Kokubun. High UV Sensitivity of SiON Film and Its Application to Center Wavelength Trimming of Microring Resonator Filter. IEICE Transactions, 88-C(5):998-1004, 2005. [doi]

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