Tobias Uhlig, Oliver Rose. Simulation-based optimization for groups of cluster tools in semiconductor manufacturing using simulated annealing. In S. Jain, Roy R. Creasey Jr., Jan Himmelspach, K. Preston White, Michael C. Fu, editors, Winter Simulation Conference 2011, WSC'11, Phoenix, AZ, USA, December 11-14, 2011. pages 1857-1868, WSC, 2011. [doi]
Abstract is missing.