D. Um, B. Asiabanpour, D. Foor, M. Kurtz, M. Tellers, M. T. McGregor. Micro scale silicon dioxide gear fabrication by bulk micromachining process. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 860-864, IEEE, 2010. [doi]
Abstract is missing.