Shota Umeda, Ryoji Asakura, Fumihiro Ga, Masahiro Sumiya. Feature Extraction for Predictive Maintenance for Semiconductor Plasma Etching Equipment. In 62nd Annual Conference of the Society of Instrument and Control Engineers, SICE 2023, Tsu, Japan, September 6-9, 2023. pages 1146-1151, IEEE, 2023. [doi]
Abstract is missing.