Polishing Characteristics and Mechanism of Polishing Glass Substrate Using Suede Pad with Fine Micrometer-Sized Pores

Michio Uneda, Nodoka Yamada, Yoshihiro Tawara. Polishing Characteristics and Mechanism of Polishing Glass Substrate Using Suede Pad with Fine Micrometer-Sized Pores. IJAT, 16(1):52-59, 2022. [doi]

@article{UnedaYT22,
  title = {Polishing Characteristics and Mechanism of Polishing Glass Substrate Using Suede Pad with Fine Micrometer-Sized Pores},
  author = {Michio Uneda and Nodoka Yamada and Yoshihiro Tawara},
  year = {2022},
  doi = {10.20965/ijat.2022.p0052},
  url = {https://doi.org/10.20965/ijat.2022.p0052},
  researchr = {https://researchr.org/publication/UnedaYT22},
  cites = {0},
  citedby = {0},
  journal = {IJAT},
  volume = {16},
  number = {1},
  pages = {52-59},
}