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Silicon 3D-integration technology and systems

Pascal Urard, Ken Takeuchi, Kerry Bernstein, Hideto Hidaka, Michael Phan, Joo-Sun Choi, Bob Payne, Vladimir Stojanovic, Kees van Berkel, Takayasu Sakurai. Silicon 3D-integration technology and systems. In IEEE International Solid-State Circuits Conference, ISSCC 2010, Digest of Technical Papers, San Francisco, CA, USA, 7-11 February, 2010. pages 510-511, IEEE, 2010. [doi]

Authors

Pascal Urard

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Ken Takeuchi

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Kerry Bernstein

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Hideto Hidaka

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Michael Phan

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Joo-Sun Choi

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Bob Payne

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Vladimir Stojanovic

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Kees van Berkel

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Takayasu Sakurai

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