Pascal Urard, Ken Takeuchi, Kerry Bernstein, Hideto Hidaka, Michael Phan, Joo-Sun Choi, Bob Payne, Vladimir Stojanovic, Kees van Berkel, Takayasu Sakurai. Silicon 3D-integration technology and systems. In IEEE International Solid-State Circuits Conference, ISSCC 2010, Digest of Technical Papers, San Francisco, CA, USA, 7-11 February, 2010. pages 510-511, IEEE, 2010. [doi]
Abstract is missing.