Simulation-based work load and job release control for semiconductor manufacturing

Keiichiro Urayama, Michael C. Fu, Steven I. Marcus. Simulation-based work load and job release control for semiconductor manufacturing. In 54th IEEE Conference on Decision and Control, CDC 2015, Osaka, Japan, December 15-18, 2015. pages 7329-7334, IEEE, 2015. [doi]

Abstract

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