Robust H∞controller-design for an electrostatic micro-actuator with squeezed gas film damping effects

Marialena Vagia, Anthony Tzes. Robust H∞controller-design for an electrostatic micro-actuator with squeezed gas film damping effects. In European Control Conference, ECC 2009, Budapest, Hungary, 23-26 August 2009. pages 2881-2886, IEEE, 2009. [doi]

Abstract

Abstract is missing.