Significance of the substrate temperature on the physical properties of RF sputtered Sb2Te3 thin films

N. E. Vázquez-Barragán, Jose Santos-Cruz, C. E. Pérez-García, Sandra Andrea Mayén-Hernández, M. Meléndez-Lira, Francisco Javier De Moure-Flores. Significance of the substrate temperature on the physical properties of RF sputtered Sb2Te3 thin films. In 20th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2023, Mexico City, Mexico, October 25-27, 2023. pages 1-5, IEEE, 2023. [doi]

Abstract

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