Francesco Venturini, Maurizio Sansotera, Rebeca Martinez Vazquez, Roberto Osellame, Giulio Cerullo, Walter Navarrini. Micromanufacturing in Fused Silica via Femtosecond Laser Irradiation Followed by Gas-Phase Chemical Etching. Micromachines, 3(4):604-614, 2012. [doi]
Abstract is missing.