MEMS with fringing field: curvature-dependent electrostatic field and numerical techniques for recovering the membrane profile

Mario Versaci, Paolo Di Barba, Francesco Carlo Morabito. MEMS with fringing field: curvature-dependent electrostatic field and numerical techniques for recovering the membrane profile. Comput. Appl. Math., 40(4), 2021. [doi]

Abstract

Abstract is missing.