Validating manufacturing processes using timed sequential machines: application to a semiconductor manufacturing process (WIP)

Pamela Viale, Norbert Giambiasi, Claudia S. Frydman, Jacques Pinaton. Validating manufacturing processes using timed sequential machines: application to a semiconductor manufacturing process (WIP). In Gabriel Andrés Wainer, Pieter J. Mosterman, editors, 2012 Spring Simulation Multiconference, SpringSim '12, Orlando, FL, USA, March 26-29, 2012, Proceedings of the 2012 Symposium on Theory of Modeling and Simulation - DEVS Integrative M&S Symposium. pages 51, SCS/ACM, 2012. [doi]

@inproceedings{VialeGFP12,
  title = {Validating manufacturing processes using timed sequential machines: application to a semiconductor manufacturing process (WIP)},
  author = {Pamela Viale and Norbert Giambiasi and Claudia S. Frydman and Jacques Pinaton},
  year = {2012},
  url = {http://dl.acm.org/citation.cfm?id=2346667},
  researchr = {https://researchr.org/publication/VialeGFP12},
  cites = {0},
  citedby = {0},
  pages = {51},
  booktitle = {2012 Spring Simulation Multiconference, SpringSim '12, Orlando, FL, USA, March 26-29, 2012, Proceedings of the 2012 Symposium on Theory of Modeling and Simulation - DEVS Integrative M&S Symposium},
  editor = {Gabriel Andrés Wainer and Pieter J. Mosterman},
  publisher = {SCS/ACM},
  isbn = {978-1-61839-786-7},
}