Validating manufacturing processes using timed sequential machines: application to a semiconductor manufacturing process (WIP)

Pamela Viale, Norbert Giambiasi, Claudia S. Frydman, Jacques Pinaton. Validating manufacturing processes using timed sequential machines: application to a semiconductor manufacturing process (WIP). In Gabriel Andrés Wainer, Pieter J. Mosterman, editors, 2012 Spring Simulation Multiconference, SpringSim '12, Orlando, FL, USA, March 26-29, 2012, Proceedings of the 2012 Symposium on Theory of Modeling and Simulation - DEVS Integrative M&S Symposium. pages 51, SCS/ACM, 2012. [doi]

Abstract

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