Designing a Sustainable and Distributed Generation System for Semiconductor Wafer Fabs

Saul Villarreal, Jesus A. Jimenez, Tongdan Jin, Mauricio Cabrera-RĂ­os. Designing a Sustainable and Distributed Generation System for Semiconductor Wafer Fabs. IEEE T. Automation Science and Engineering, 10(1):16-26, 2013. [doi]

Abstract

Abstract is missing.