Device characterization of 16/14 nm FinFETs for reliability assessment with infrared emission spectra

Ivo Vogt, T. Nakamura, B. Motamedi, Christian Boit. Device characterization of 16/14 nm FinFETs for reliability assessment with infrared emission spectra. Microelectronics Reliability, 88:11-15, 2018. [doi]

Abstract

Abstract is missing.