Detection of failure mechanisms in 24-40 nm FinFETs with (spectral) photon emission techniques using InGaAs camera

Ivo Vogt, T. Nakamura, Ingrid De Wolf, Christian Boit. Detection of failure mechanisms in 24-40 nm FinFETs with (spectral) photon emission techniques using InGaAs camera. Microelectronics Reliability, 88:334-338, 2018. [doi]

Abstract

Abstract is missing.